Vol. 1 No. 1 (2025): Discharge Structure of Ar/SF6 Inductively Coupled Plasma at Relatively Low Pressures

The discharge structure in an electronegative Ar/SF6 inductively coupled plasma is investigated in
the article at low pressure, 10mTorr. Parabola profile in the electronegative plasma core is given by
the fluid simulation, in accordance to the prediction of analytical theory. Except the ordinary sheath,
the overall discharge is separated into the electronegative core and electropositive edge, which are
connected by a dielectric-type double layer.