Vol. 1 No. 1 (2025): Discharge structure of Ar/SF6 inductively coupled plasma at high pressure

In the article, the discharge structure of Ar/SF6 inductively coupled plasma at high pressure is studied.
At high electronegativity, the island potential is formed at discharge initial stage, and most of
plasma dynamics are occurred in the potential. The self-coagulation and diffusion of both ambi-polar
type exist in the plasma. The plasma is torn by the competition of them and a blue sheath is appeared
in plasma.