Discharge structure of Ar/SF6 inductively coupled plasma at high pressure
1 Key Laboratory of Material Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, 116024, Dalian, China
* Corresponding Author:
Shu-Xia Zhao
How to Cite
Shu-Xia Zhao. Discharge structure of Ar/SF6 inductively coupled plasma at high pressure. Global Open Access Journal of Science; 1(1):34–45.