Discharge structure of Ar/SF6 inductively coupled plasma at high pressure
1 Key Laboratory of Material Modification by Laser, Ion, and Electron Beams (Ministry of Education),
School of Physics, Dalian University of Technology, 116024, Dalian, China
* Corresponding Author:
Shu-Xia Zhao
Corresponding Address:
Key Laboratory of Material Modification by Laser, Ion, and Electron Beams (Ministry of
Education), School of Physics, Dalian University of Technology, 116024, Dalian, China,
Education), School of Physics, Dalian University of Technology, 116024, Dalian, China,
How to Cite
Shu-Xia Zhao. Discharge structure of Ar/SF6 inductively coupled plasma at high pressure. Global Open Access Journal of Science; 1(1):34–45.