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Discharge Structure of Ar/SF6 Inductively Coupled Plasma at Relatively Low Pressures

Topic: Physics Volume 1, Issue 1 October 13, 2025
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Global Open Access Journal of Science Physics Pages: 66–80

Discharge Structure of Ar/SF6 Inductively Coupled Plasma at Relatively Low Pressures

1 Key Laboratory of Material Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, 116024, Dalian, China
* Corresponding Author: Shu-Xia Zhao
Corresponding Address: Key Laboratory of Material Modification by Laser, Ion, and Electron Beams (Ministry of
Education), School of Physics, Dalian University of Technology, 116024, Dalian, China
Journal Global Open Access Journal of Science
Article Type Research Article
Article Topic Physics
Volume / Issue Volume 1, Issue 1
Pages 66–80
Published October 13, 2025

Abstract

The discharge structure in an electronegative Ar/SF6 inductively coupled plasma is investigated in the article at low pressure, 10mTorr. Parabola profile in the electronegative plasma core is given by the fluid simulation, in accordance to the prediction of analytical theory. Except the ordinary sheath, the overall discharge is separated into the electronegative core and electropositive edge, which are connected by a dielectric-type double layer. This is a novel type of double layer, distinct from the previously reported ones that are found in the space plasma and triggered by stream instability. A self-coagulated density bump is observed stamping onto the parabolic basis at the chamber periphery along polar direction. In the core, the anion is obeyed to the Boltzmann’s balance and the density profile of electron is flattened at its own and the anion Boltzmann balances. The discovered discharge structure in electronegative plasma by means of simulation and theory is important for people to better understand and utilize the laboratory plasmas

How to Cite

Shu-Xia Zhao. Discharge Structure of Ar/SF6 Inductively Coupled Plasma at Relatively Low Pressures. Global Open Access Journal of Science; 1(1):66–80.
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